| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a displacement detecting apparatus can prevent an effect of contaminations deposited on the surface of a glass substrate for example, and detect a displacement of a surface position of the glass substrate with high accuracy. <P>SOLUTION: The displacement detecting apparatus for detecting a displacement of a surface position of a surface to be inspected 20a, includes an irradiation system (IL: 1, 2, 3, 4, 5) for irradiating a surface of an object 20 as the surface to be inspected, after a focal point P is formed once by an objective lens 5 based on light from a light source LS, and a detection system (DS: 5, 4, 3, 6, 7, 8, 9) for detecting the displacement of the surface position of the surface to be inspected based on light reflected by the surface to be inspected and allowed to pass through the objective lens. <P>COPYRIGHT: (C)2010,JPO&INPIT |
