IMAGING SYSTEM AND METHOD FOR ALIGNMENT

摘要

An imaging system for and a method of imaging at least one workpiece alignment feature on an upper surface of a supported workpiece, the system comprising : a workpiece support which includes a support surface for supporting a workpiece; and at least one imaging unit which is disposed below the support surface of the workpiece support for imaging at least one workpiece alignment feature on the upper surface of the workpiece, wherein the at least one imaging unit comprises an infra-red illuminator which is operative to illuminate a region of a lower surface of the workpiece and a detector which is operative to capture an image of the region of the workpiece which includes at least one workpiece alignment feature on the upper surface of the workpiece.