REVIEWING PROCESS AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a process of reviewing failure using electronic microscope and to provide a failure reviewing device which can reduce a man-hour of user required for setting automatic focus by electron beam and to facilitate the observation of a sample. SOLUTION: The process of reviewing comprises taking a focus on a plurality of coordinate positions registered beforehand on the coordinate to be observed, preparing a focus standard based on each focus position on the coordinate position, setting a focal searching area based on an amount of misalignment between the standard and the focus position, and determining an automatic focus range for detecting failure on subjects to be observed based on the set focal searching range. COPYRIGHT: (C)2009,JPO&INPIT