发明名称 PROBING APPARATUS WITH GUARDED SIGNAL TRACES
摘要 probing apparatus can comprise a substrate, conductive signal traces, probes, and electromagnetic shielding. The substrate can have a first surface and a second surface opposite the first surface, and the electrically conductive first signal traces can be disposed on the first surface of the first substrate. The probes can be attached to the first signal traces, and the electromagnetic shielding structures can be disposed about the signal traces. ® KIPO & WIPO 2009
申请公布号 KR20090086459(A) 申请公布日期 2009.08.12
申请号 KR20097013751 申请日期 2007.11.30
申请人 FORMFACTOR, INCORPORATED 发明人 ELDRIDGE BENJAMIN N.;REYNOLDS CARL V.;SAEKI TAKAO;URAKAWA YOICHI
分类号 H01L21/66;G01R31/26;G01R31/28 主分类号 H01L21/66
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