| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator capable of easily adjusting a shape of a cylindrical body so as to generate plasma of the desired density. <P>SOLUTION: The plasma generator includes a chamber 12 and a cylindrical body 18 arranged in the chamber 12 to generate plasma therein. The cylindrical body 18 has a constitution in which a plurality of annular rings 18a are connected to each other via a connection bar 18b in a stacked state with a predetermined space therebetween in one direction. <P>COPYRIGHT: (C)2009,JPO&INPIT |
