PROBE CARD, SEMICONDUCTOR INTEGRATED CIRCUIT TESTING DEVICE, AND SEMICONDUCTOR INTEGRATED CIRCUIT TEST METHOD

摘要

PROBLEM TO BE SOLVED: To prevent a damage of a measuring probe needle when performing a large-numbered parallel test, and to heighten inspection efficiency, concerning a probe card, a semiconductor integrated circuit testing device and a semiconductor integrated circuit test method. SOLUTION: This probe card 1 equipped with a plurality of probe needle sets 3 corresponding respectively to a plurality of semiconductor integrated circuit chips 7 is provided with a mechanism 5 for switching a contact state/noncontact state to the semiconductor integrated circuit chip 7 relative to each probe needle set 3. COPYRIGHT: (C)2009,JPO&INPIT