APPARATUS AND METHOD FOR SUPPLYING STAMP IN IMPRINTING PROCESS

摘要

An apparatus and a method for supplying a stamp in an imprinting process are provided to improve precision in a next implant process by supplying a stamp to a rest of the stamp firstly and transferring it to chamber lid. A chamber base(100) supports a substrate coated by a photocurable resin to form a fine pattern, and a chamber lid is manufactured to be adhered closely to the upper part of the chamber base to form a airtight space. A stamp supporting part(111) is installed at the chamber lid, and a pattern is implanted on a substrate while the stamp supporting part supports the stamp made of photocurable resin to be detachable. A plate stamp rest(120) provides a stamp when the chamber lid is separated from the camber base while being installed under the chamber lid. The one side of a nozzle(123) is opened to top of the stamp rest and the other side is extended to the outside through a stamp rest.