DEVICE FOR COLLECTING FLUX OF ELECTROMAGNETIC RADIATION IN THE EXTREME ULTRAVIOLET,申请号EP20070731249-传众专利搜索

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发明名称	DEVICE FOR COLLECTING FLUX OF ELECTROMAGNETIC RADIATION IN THE EXTREME ULTRAVIOLET
摘要
申请公布号	EP2005252(B1)	申请公布日期	2009.06.24
申请号	EP20070731249	申请日期	2007.04.04
申请人	SAGEM DEFENSE SECURITE	发明人	GEYL, ROLAND;PATOZ, VINCENT;RIGUET, FRANCOIS;DUFRESNE DE VIREL, FRANCOIS
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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