| 摘要 |
PROBLEM TO BE SOLVED: To provide a grid projection type moire device capable of easily changing the pitches of both grids, removing an unnecessary fringe, and performing irregularity determination of a measurement object with a simple constitution. SOLUTION: A grid projection type moire device for measuring shape of a measurement object comprises: a projection optical system 20 for projecting the shape of a first liquid crystal grid 26 on a measurement object 42; an image-forming optical system 30 for image-forming the deformation grid image formed on the measurement object 42 on a second liquid crystal grid 38; a photographing part 32 for photographing the moire fringe formed by the image-forming to acquire the moire fringe image; and a control part 50 for controlling the grid patterns of the first liquid crystal grid 26 and the second liquid crystal grid 38. COPYRIGHT: (C)2009,JPO&INPIT
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