发明名称 |
ANTI-RESONANT REFLECTING OPTICAL WAVEGUIDE FOR CMOS IMAGER LIGHT PIPE |
摘要 |
<p>An anti-resonant reflecting optical waveguide structure for reducing optical crosstalk in an image sensor and method of forming the same. The method includes forming a trench within a plurality of material layers and over a photo-conversion device. The trench is vertically aligned with the photo-conversion device and is filled with materials of varying refractive indices to form an anti-resonant reflecting optical waveguide structure. The anti-resonant reflecting optical waveguide structure has a core and at least two cladding structures. The cladding structure in contact with the core has a refractive index that is higher than the refractive index of the core and the refractive index of the other cladding structure. The cladding structures act as Fabry-Perot cavities for light propagating in the transverse direction, such that light entering the anti-resonant reflecting optical waveguide structure remains confined to the core. This reduces the chance of photons impinging upon neighboring photo-conversion devices.</p> |
申请公布号 |
WO2009067439(A1) |
申请公布日期 |
2009.05.28 |
申请号 |
WO2008US83890 |
申请日期 |
2008.11.18 |
申请人 |
APTINA IMAGING CORPORATION;LEE, HONG-WEI |
发明人 |
LEE, HONG-WEI |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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