| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of liquid discharge head which enables it to suppress the variation of characteristic of a piezoelectric actuator for every product while relaxing the thermal stress applied to a piezoelectric layer. SOLUTION: An inkjet head 10 has a flow path unit 11, an oscillating plate 2 and the piezoelectric layer 5. In the flow path unit 11, a pressure chamber 17 whose one surface is opened and a nozzle 19 communicating to the pressure chamber 17 are formed, and the oscillating plate 2 is fixed to one surface of the flow path unit so as to close the opening 17a of the pressure chamber 17. In the surface side which is the surface opposite to the flow path unit 11 of the oscillating plate 2, the piezoelectric layer 5 is provided. The inkjet head 10 having such a configuration is manufactured through a recess forming process which forms two or more recesses 8 in the part not corresponding to the pressure chamber in the rear surface opposite to the surface of the oscillating plate 2, and a piezoelectric layer forming process which forms the piezoelectric layer 5 by spurting out an aerosol of piezoelectric material to the area which includes the part corresponding to the pressure chamber 17 and the part corresponding to the recess 8 at the oscillating plate 2. COPYRIGHT: (C)2009,JPO&INPIT
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