| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacity coupling plasma reactor capable of uniformly generating and maintaining plasma with a large area. <P>SOLUTION: The capacity coupling plasma reactor includes a plasma reactor (10), a capacity coupling electrode assembly (30) including a plurality of capacity coupling electrodes (31, 33) for guiding plasma discharge into the plasma reactor (10), a main power supply source (40) for supplying radio frequency current, and a distribution circuit (50) for distributing the radio frequency current to the plurality of capacity coupling electrodes by receiving the radio frequency current supplied from the main power supply source (40). The capacity coupling plasma reactor can uniformly generate the plasma with a large area by the plurality of capacity coupling electrodes (31, 33). The plasma with a large area can be more uniformly generated and maintained by having current balance automatically performed when the plurality of capacity coupling electrodes (31, 33) are driven in parallel. <P>COPYRIGHT: (C)2009,JPO&INPIT |
