| 发明名称 |
METHOD OF MAKING HIERARCHICAL ARTICLES |
| 摘要 |
Provided is a method of making hierarchical structures that contain nanofeatures and microstructures. The method includes adding the nanofeatures to existing microstructures using nanoparticles as an etch mask.
|
| 申请公布号 |
US2009114618(A1) |
申请公布日期 |
2009.05.07 |
| 申请号 |
US20080124302 |
申请日期 |
2008.05.21 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
ZHANG JUN-YING;SMITH TERRY L. |
| 分类号 |
B44C1/22;G03F7/20 |
主分类号 |
B44C1/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
