FABRICATION OF METAL OXIDE AND METAL NITIRIDE NANOSTRUCTURE

摘要

A method for producing a metal-oxide and metal-nitride nano structure is provided to show orientation of a zinc oxide thin film in order to secure an influence of the different orientations of the zinc oxide thin film on a shape of a zinc oxide nano wire according to solutions used for removing native oxide films. A method for producing a metal-oxide and metal-nitride nano structure comprises the following steps of: removing a native oxide film(4) formed on a substrate using different removal methods; coating the substrate with a metal-oxide and metal-nitride thin film; and growing metal-oxide and metal-nitride nano wires(12) on the metal-oxide and metal-nitride thin film. A solution for removing the native oxide films contains 50-80% of ammonium fluoride on a total volume of the solution. The ammonium fluoride is known for removing dissolved oxygen through bubbling.