发明名称 |
AUTOMATICALLY REPLACEABLE APPARATUS FOR COLLECTING BYPRODUCTS AND THE CONTROLLING METHOD THEREOF IN EQUIPMENT PRODUCING SEMICONDUCTOR |
摘要 |
Disclosed herein are an automatically replaceable apparatus for collecting byproducts in semiconductor producing equipment and a control method thereof. The apparatus includes several trap units mounted to a vertical shaft at regular angular intervals and rotating in response to a driving direction of a servo motor. Upper and lower plates support the vertical shaft, and connect byproduct inlet and outlet ports, cleaning-water supply and discharge ports, and dry-gas supply and exhaust ports to the respective trap units. Trap and plate coupling means are extended at normal times to air-tightly seal gaps between the upper and lower plates and the trap units, and contracted when the trap units are rotated in a predetermined direction for the replacement. The servo motor is mounted to a lower surface of the lower plate and rotates the trap units within a predetermined angular range. A control unit controls the operation of the components. |
申请公布号 |
EP2041775(A1) |
申请公布日期 |
2009.04.01 |
申请号 |
EP20060798706 |
申请日期 |
2006.09.08 |
申请人 |
MILAEBO CO., LTD. |
发明人 |
CHO, CHE-HOO;LEE, SEUNG-IL;YUN, YOUNG-JUN |
分类号 |
H01L21/02;C23C16/44;C30B25/14 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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