发明名称 |
Body for keeping a wafer, heater unit and wafer prober |
摘要 |
A wafer holding body used for a wafer prober for testing a semiconductor wafer includes a chuck top having a conductive layer on a surface thereof and a support body supporting the chuck top. The support body has a base portion opposing the chuck top and a side portion extending from the perimeter of the base portion to the chuck top to support the chuck top. A cavity portion is formed between the chuck top and the base portion of the support body. A reflection plate is provided in the cavity portion. A heater unit and a wafer prober includes the wafer holding body.
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申请公布号 |
US7495460(B2) |
申请公布日期 |
2009.02.24 |
申请号 |
US20060498966 |
申请日期 |
2006.08.04 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
ITAKURA KATSUHIRO;NATSUHARA MASUHIRO;NAKATA HIROHIKO |
分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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