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摘要
申请公布号
JP4227616(B2)
申请公布日期
2009.02.18
申请号
JP20050504024
申请日期
2004.03.19
申请人
发明人
分类号
H01L21/205;C23C16/02;C23C16/42;C23C16/44;C30B25/02;C30B25/18;C30B29/52
主分类号
H01L21/205
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代理人
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