| 摘要 |
PROBLEM TO BE SOLVED: To restrain increase in contact resistance between electrodes and drop in yields in a liquid crystal display device which controls liquid crystal by using a nearly horizontal electric field to a transparent substrate. SOLUTION: A first etching stopper electrode 20P connected to a drain electrode 16D, and a common electrode 20 connected to a drawing line 16C are formed through a passivation film 17 which covers a pixel transistor TR, and contact holes H8 and H9 formed on a planarized film 18. Then, an insulating film 21 covering these electrodes 20P and 20 is formed, and the insulating film 21 is subjected to selective dry etching. Then, the remaining deposits DP2 on the first etching stopper electrode 20P are removed by wet etching. Then, a pixel electrode 22 which extends on the insulating film 21 is formed while being connected to the first etching stopper electrode 20P. COPYRIGHT: (C)2009,JPO&INPIT |
