| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus for making it unlikely that the pollution of a substrate with a metal atom diffused from the front surface of a member in a region for treating the substrate occurs, a heat treatment member, and to provide a method of manufacturing the heat treatment member. SOLUTION: The heat treatment apparatus 10 has a support tool 30 made of silicon carbide in a region for heat-treating a substrate 54. The support tool 30 is constituted by forming an SiC layer 30b on a base 30a made of silicon carbide, forming an Si film 30c on the SiC layer 30b, and allowing the Si film 30c to be changed into a silicon oxide film 30d by oxidation, exposing the SiC layer 30b by removing the silicon oxide film 30d after the Si film 30c is changed into the silicon oxide film 30d, or exposing the SiC layer 30b by removing the Si film 30c. COPYRIGHT: (C)2009,JPO&INPIT
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