发明名称 METHOD FOR AUTOMATICALLY CORRECTING MARKING PATTERN OFFSET ACCORDING TO DRIVING AXIS DEVIATION IN LASER MARKING SYSTEM
摘要 A method for automatically correcting a marking pattern offset caused by driving axis deviation in a laser marking system is provided to improve accuracy of a marking result and reduce manufacturing cost of test equipment. A method for automatically correcting a marking pattern offset caused by driving axis deviation in a laser marking system comprises the following steps. A photosensitive plate is fixed on a stage and a dot pattern for a test is marked at a predetermined interval. A vertical center line of a camera screen is matched with a virtual center line for the dot pattern for a test marked. The stage is moved in a Y-axis direction and stopped in a predetermined location so that the dot pattern for a test is photographed.
申请公布号 KR20090011266(A) 申请公布日期 2009.02.02
申请号 KR20070074679 申请日期 2007.07.25
申请人 YTS CO., LTD. 发明人 HONG, SANG PYO;BAEG, SEUNG WOONG;NA, JONG SANG;HWANG, YONG YEON;KIM, DONG WOOK;CHOL, JUN HO;GO, SEUNG YONG
分类号 B23K26/00;H01L23/544 主分类号 B23K26/00
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