STAGE DEVICE, ITS LIFTING CONTROL METHOD, AND EXPOSURE DEVICE USING STAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a small stage device capable of ultraprecise positioning.

SOLUTION: This stage device 1 is provided with: a fixation base 2 having lifting electromagnets 4 arranged to face a movable base 3 at least three by three; the movable base 3 supported by the lifting electromagnets 4 by a noncontact magnetic lifting method; gap sensors 12 for lifting control provided for the movable base 3; a two-dimensional linear sensor 8 arranged at the center of the movable base 3; and linear motors 5 driving the movable base 3. The stage device is also provided with optical measurement means 51, 52 and 53 detecting a position in the vicinity of the position of the center of gravity of the movable base 3.

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