HIGH-FREQUENCY INDUCTION HEATING APPARATUS AND PLASMA CVD APPARATUS

摘要

A heat insulating fiber material with reflection property is disposed between a work coil and a heating object to thereby not only inhibit any mutual radiant heat transfer but also exert heat insulating effects. Accordingly, the mutual interference by radiant heat transfer between the work coil and the heating object is reduced. The high-frequency induction heating apparatus comprises a planar spiral work coil capable of, in heating mechanism utilizing a high-frequency induction heating action used in a vacuum environment, receiving supply of high-frequency power and realizing flow of induction current on a heating object part by high-frequency induction to thereby attain heating thereof and, disposed between the work coil and the heating object part, a heat insulating fiber material with reflection property.