| 摘要 |
PROBLEM TO BE SOLVED: To provide a precursor useful for producing ALD strontium titanate(STO) or barium strontium titanate (BST) film in manufacturing semiconductors. SOLUTION: New Sr and Ba complexes each containing both ofβ-diketonate and N-methyl pyrrolidone are provided, for example, being Ba2(hfac)4(NMP)5 and Sr2(tmhd)4(NMP)4. These complexes, which are volatile, can be used as precursors capable of producing ALD strontium titanate (STO) or barium strontium titanate (BST) film. COPYRIGHT: (C)2009,JPO&INPIT
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