| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve productivity by shortening a micro-mirror switching time of DMD (digital micro-mirror device) elements when increasing a plotting speed using the DMD elements to improve productivity. <P>SOLUTION: This plotting device 100 comprises the DMD elements 41 each having a large number or micro-mirrors M arranged in matrix shape; a light source 10 supplying exposure light to the micro-mirrors M; and a bias voltage control part 83 applying a first voltage for setting the micro-mirrors M into a first state to guide exposure light to a surface to be exposed (CB) and applying no voltage to set the reflecting elements into a second state so that the exposure light does not reach the surface to be exposed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
