发明名称 |
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摘要 |
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申请公布号 |
JPS4966081(A) |
申请公布日期 |
1974.06.26 |
申请号 |
JP19720107223 |
申请日期 |
1972.10.27 |
申请人 |
|
发明人 |
|
分类号 |
H01L29/78;H01L21/82 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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