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发明名称
CHIP IN INTEGRIERTER SCHALTUNGSTECHNIK UND VERFAHREN UND EINRICHTUNG ZU DESSEN PRUEFUNG
摘要
申请公布号
DE3824934(A1)
申请公布日期
1989.02.09
申请号
DE19883824934
申请日期
1988.07.22
申请人
INTEL CORP., SANTA CLARA, CALIF., US
发明人
KINI, M. VITTAL;MYERS, MARK S., PORTLAND, OREG., US;SHENOY, SUNIL, BEAVERTON, OREG., US
分类号
G01R31/28;G06F11/16;G06F11/22;G06F11/267;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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