发明名称 |
CROSS-SECTION HOURGLASS SHAPED CHANNEL REGION FOR CHARGE CARRIER MOBILITY MODIFICATION |
摘要 |
A semiconductor structure and a method for fabricating the semiconductor structure include a semiconductor substrate having a cross-section hourglass shaped channel region. A stress imparting layer is located adjacent the channel region. The hourglass shape may provide for enhanced vertical tensile stress within the channel region when it is longitudinally compressive stressed by the stress imparting layer.
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申请公布号 |
US2008258180(A1) |
申请公布日期 |
2008.10.23 |
申请号 |
US20060306721 |
申请日期 |
2006.01.09 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHEN HUAJIE;CHIDAMBARRAO DURESETI;HOLT JUDSON R.;OUYANG QIQING;PANDA SIDDHARTHA |
分类号 |
H01L29/78;H01L21/336;H01L29/04 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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