Fixed device for thin film sputter and fixed method using the same,申请号KR20020030613-传众专利搜索

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发明名称	Fixed device for thin film sputter and fixed method using the same
摘要
申请公布号	KR100838065(B1)	申请公布日期	2008.06.16
申请号	KR20020030613	申请日期	2002.05.31
申请人		发明人
分类号	C23C14/24;H05B33/10;C23C14/04;C23C14/50	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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