| 摘要 |
A device for spin-coating substrates ( 8 ) with liquid media is proposed, which comprises a rotatable substrate plate ( 2 ) for the horizontal support of a substrate ( 8 ), and a covering unit ( 9 ) for covering the substrate ( 8 ) during a distribution operation of the liquid medium by means of rotation of the substrate holder ( 2 ). According to the invention, the substrate holder ( 2 ) can be joined tightly to the covering unit ( 9 ). In addition, however, passage holes arranged circumferentially are provided, via which the internal coating space ( 10 ) formed from covering unit ( 9 ) and substrate holder ( 2 ) is still connected to the outside.
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