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发明名称
Method of Forming Insulator Layer and Method of Manufacturing Non-Volatile Memory Device Using the same
摘要
申请公布号
KR100596484(B1)
申请公布日期
2006.07.03
申请号
KR20040038901
申请日期
2004.05.31
申请人
发明人
分类号
H01L27/115;H01L21/314;H01L21/316;H01L21/336;H01L21/4763;H01L21/8247
主分类号
H01L27/115
代理机构
代理人
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