| 摘要 |
PROBLEM TO BE SOLVED: To set a sampling interval according to the incline of a surface shape while controlling a probe in agreement with the interval, thereby adapting to the surface shape, shortening measurement time, and enhancing measurement accuracy. SOLUTION: This scanning probe microscope is characterized by therein storing observation data up to just before then as a history when a probe is caused to scan, each time setting the sampling interval in an X or Y direction based on the observation data/shape, and causing the probe to scan as far as a next sampling position. COPYRIGHT: (C)2008,JPO&INPIT |
