发明名称 MICRO-OPTICAL DEVICE WASHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a micro-optical device washing method whereby an optical face can be satisfactorily washed. SOLUTION: An adhesive sheet 1 is prepared on the surface of which an adhesive 2 has been applied (a). Each micro-optical device 3 is brought into contact with the surface of the adhesive sheet 1, for example, by being picked up with a pair of tweezers or the like (b). By separating the micro-optical device 3 from the adhesive sheet 1, the adhesive 2 in contact with the micro-optical device 3 is separated from the adhesive sheet 1 and transferred to the micro-optical device 3 (c). The micro-optical device 3 is placed on and pushed against a substrate 7 and thereby the adhesive 2 is applied to the substrate 7. As a result, the micro-optical element 3 is fixed onto the substrate 7. The operation is repeated a required number of times, thereby fixing and arranging a large number of micro-optical devices 3 onto the substrate 7 (d). Then, the optical face 6 of each of the micro-optical devices 3 is irradiated with an ultraviolet ray, for washing (e). COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008292563(A) 申请公布日期 2008.12.04
申请号 JP20070135435 申请日期 2007.05.22
申请人 NIKON CORP 发明人 ISHIWATARI KOICHI
分类号 G02B3/00;B08B7/00 主分类号 G02B3/00
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