发明名称 METHODS AND MATERIALS USEFUL FOR CHIP STACKING, CHIP AND WAFER BONDING
摘要 Materials, and methods that use such materials, that are useful for forming chip stacks, chip and wafer bonding and wafer thinning are disclosed. Such methods and materials provide strong bonds while also being readily removed with little or no residues.
申请公布号 EP1997138(A2) 申请公布日期 2008.12.03
申请号 EP20070753639 申请日期 2007.03.21
申请人 PROMERUS LLC 发明人 APANIUS, CHRIS;SHICK, ROBERT, A.;NG, HENDRA;BELL, ANDREW;ZHANG, WEI;NEAL, PHIL
分类号 H01L21/98;H01L25/065 主分类号 H01L21/98
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