| 摘要 |
PROBLEM TO BE SOLVED: To realize semiconductor integrated circuit which can detect mixing of foreign substances with high accuracy by short-time voltage application, and to obtain a testing method for semiconductor integrated circuit. SOLUTION: In the testing method for semiconductor integrated circuit, a potential difference is provided in between dummy wirings LD1 and LD2 which adjoin mutually, by applying voltage to a plurality of dummy wirings LD1, LD2 formed close to signal wirings L1-L4 of semiconductor integrated circuit. When a foreign substance is mixed between dummy wirings LD1 and LD2, the foreign substance can be detected by measuring generated leakage current. Furthermore, dummy wirings LD1, LD2 are electrically independent of other signal wirings. Accordingly, high voltage can be applied. According to this procedure, if insulation film, or the like, exists between foreign substance and dummy wirings, insulating film or the like can be broken surely, then a detection accuracy of foreign substance during testing procedure can be improved. COPYRIGHT: (C)2009,JPO&INPIT
|
