发明名称 Three-dimensional face-to-face integration assembly
摘要 A via for connecting metallization layers of chips bonded in a face-to-face configuration is provided, as well as methods of fabricating the via. The via may function as an interconnection of metallization layers in three-dimensional, stacked, integrated circuits, and may enable high density, low-resistance interconnection formation.
申请公布号 US7453150(B1) 申请公布日期 2008.11.18
申请号 US20040901939 申请日期 2004.07.29
申请人 RENSSELAER POLYTECHNIC INSTITUTE 发明人 MCDONALD JOHN
分类号 H01L23/52;H01L21/44;H01L21/46;H01L21/4763;H01L23/40;H01L23/48 主分类号 H01L23/52
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