发明名称 |
Graphical user interface for presenting multivariate fault contributions |
摘要 |
Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The user interface presents one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis and graphically illustrates contributions to the fault associated with the multiple variables by associating a contribution of each component in the one group of components of the multiple variables to each corresponding component in the second group of components of the multiple variables.
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申请公布号 |
US2008276136(A1) |
申请公布日期 |
2008.11.06 |
申请号 |
US20070800462 |
申请日期 |
2007.05.04 |
申请人 |
LIN Y SEAN;SCHWARM ALEXANDER T |
发明人 |
LIN Y. SEAN;SCHWARM ALEXANDER T. |
分类号 |
G06F11/00 |
主分类号 |
G06F11/00 |
代理机构 |
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