| 摘要 |
A loader arm of an auto loader is provided to minimize the contaminants of a wafer from being transferred to a loader arm. A back-end unit is fixed to a transferring apparatus, and plural protrusions(35) of column shape on which vacuum holes(36) are formed are formed at a front end part. A front-side loader arm(30) vacuum-sucks a front side of a wafer, and a back-side loader arm vacuum-sucks the back side of the wafer. The vacuum-suction force of the back-side loader arm is larger than the vacuum-suction force of the front-side loader arm. |
