METAL PHOTOMASK POD AND FILTER DEVICE THEREOF

摘要

A metal photomask pod with a filter device and with atmoseal function is provided. The metal photomask pod includes a metal upper cover and a metal lower cover coupled to form an inner space for receiving a photomask. A side portion of the metal upper cover or the metal lower cover of the photomask pod includes at least one through hole for communicating the inner space with an outer space of the photomask pod. A filter device covers the through hole.