发明名称 |
LIQUID TONER-BASED PATTERN MASK METHOD AND SYSTEM |
摘要 |
A liquid toner-based pattern mask system and methods of masking and patterning a substrate employ a polymer-based liquid toner as a pattern mask. The liquid toner is deposited on the substrate in a masking pattern. The pattern mask is lifted off of the substrate after patterning the substrate using a lift-off technique that breaks a bond between the surface of the substrate and the pattern mask.
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申请公布号 |
US2008248405(A1) |
申请公布日期 |
2008.10.09 |
申请号 |
US20070733176 |
申请日期 |
2007.04.09 |
申请人 |
ALMANZA-WORKMAN A MARCIA;TAUSSIG CARL P |
发明人 |
ALMANZA-WORKMAN A. MARCIA;TAUSSIG CARL P. |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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