| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method capable of performing precise surface shape measurement. SOLUTION: The shape measurement method includes: steps (S101 to S103) of varying a distance in an optical axis direction between an inspection object and an imaging optical system and imaging and acquiring a plurality of measurement images of the inspection object according to the distance in the optical axis direction; a step (S104) of calculating a plurality of heights of the surface of the inspection object on the basis of the plurality of measurement images acquired by the step; steps (S105 to S106) of determining a focused measurement image corresponding to the distance in the optical axis direction in which the imaging optical system is in a focused state to the inspection object, from among the plurality of measurement images on the basis of the plurality of heights of the surface of the inspection object calculated by the step; and fourth steps (S107 to S108) of calculating the height of the surface of the inspection object on the basis of the focused measurement image determined by the steps. COPYRIGHT: (C)2008,JPO&INPIT
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