发明名称 Structure and method of self-aligned bipolar transistor having tapered collector
摘要 A bipolar transistor is provided which includes a tapered, i.e. frustum-shaped, collector pedestal having an upper substantially planar surface, a lower surface, and a slanted sidewall extending between the upper surface and the lower surface, the upper surface having substantially less area than the lower surface. The bipolar transistor further includes an intrinsic base overlying the upper surface of the collector pedestal, a raised extrinsic base conductively connected to the intrinsic base and an emitter overlying the intrinsic base. In a particular embodiment, the emitter is self-aligned to the collector pedestal, having a centerline which is aligned to the centerline of the collector pedestal.
申请公布号 US7425754(B2) 申请公布日期 2008.09.16
申请号 US20040708340 申请日期 2004.02.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AKATSU HIROYUKI;DIVAKARUNI RAMA;FREEMAN GREGORY G.;GREENBERG DAVID R.;KHATER MARWAN H.;TONTI WILLIAM R.
分类号 H01L27/102;H01L21/331;H01L27/082;H01L29/08;H01L29/737 主分类号 H01L27/102
代理机构 代理人
主权项
地址