| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that the performance of a device is deteriorated due to a wait time when drive is performed by setting the wait time in order to absorb nonuniformity since nonuniformity exists in an on/off time and the on/off time is changed due to the secular change of a light receiving element, etc., though many optical MOSFET relays are used in the semiconductor testing device. <P>SOLUTION: The optical MOSFET relays are driven by a variable current driving part capable of varying an output current. Then the output current of the variable current driving part is adjusted, thereby obtaining a value with the on/off time set therein. Thus, there is no need to set the wait time since the nonuniformity of the on/off time of the optical MOSFET relay can be absorbed, thereby improving the performance of the semiconductor testing device. Besides, the secular change of the on/off time is compensated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
