| 摘要 |
Embodiments of the present disclosure may include a piezoelectric pump having: a piezoelectric vibrator whose periphery may be fluid-tightly sealed; and a pump chamber and an air chamber that may be formed on front and rear sides of the piezoelectric vibrator. The piezoelectric vibrator may include: a main shim that may be formed of a conductive thin metal plate; a plurality of piezoelectric element layers that may be formed on the main shim; and an intermediate shim that may be formed between the plurality of piezoelectric element layers and may be made of an elastic metal material having mechanical recovery. The piezoelectric vibrator may be vibrated to perform a pumping operation. |
