PIEZOELECTRIC VIBRATOR, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator and a manufacturing method thereof such that optical recognition after sealing is made attainable by preventing a lid from breaking and/or cracking and by joining the lid and a package with small area. SOLUTION: The package 60 includes a bottom portion 62 to which a piezoelectric vibration chip 1 is fixed and a frame wall portion 64 which has at least its upper end surface 66 made of metal and encloses the bottom portion 62, and has an opening above the bottom portion 62. The lid 100 overlaps the bottom portion 62 and frame wall portion 64 to close the opening of the package 60. The lid 100 includes a frame body 110. The lid 100 also includes a transparent body 120 which is fitted inside the frame body 110 and formed so that a top surface portion may be wider than other thickness-directional portions. The lid 100 includes a flange 130 which is in level with the top surface of the frame body 110, but extends to outside the frame body 110 so as to form a step difference with the reverse surface. The frame body 110 and flange 130 are made of metal. The flange 130 is metal-bonded to the frame wall portion 64. COPYRIGHT: (C)2008,JPO&INPIT