| 摘要 |
<p>Provided is an electrostatic chuck which prevents abnormal discharge generated in a dielectric layer or substrate and has a structure suitable for reusing. An electrostatic chuck (1) is provided with a substrate (2), a suction electrode (3), and a dielectric layer (4). Ring-like gas channels (21, 22) are arranged on the substrate (2) as recesses. Supporting members (5-1, 5-2) which support an insulator (6) are fitted in the gas channels (21, 22).Inside a long groove (8) formed on the supporting members (5-1 (5-2)) is filled with the insulator (6). The insulator (6) is composed of a porous ceramic, forms a ring-like strip corresponding to the gas channel (21 (22)) as a whole, and the width of the upper surface is set larger than the diameter of a ventilation hole (41) of the dielectric layer (4). A lower opening of the ventilation hole (41) abuts to the upper surface of the insulator (6), and the ventilation hole (41) communicates with the gas channel (21 (22)) through the insulator (6). Preferably, a notch (51a) is arranged on the supporting member (5-1 (5-2)).</p> |
