发明名称 THIN FILM TRANSISTOR DEVICE, METHOD OF MANUFACTURING THE SAME, AND DISPLAY APPARATUS
摘要 A thin film transistor device includes a semiconductor layer including a source region, a drain region and a channel region formed above a substrate, a metal film formed in a prescribed area on the semiconductor layer, a gate insulating film formed on the metal film and the semiconductor layer, a gate electrode, an interlayer insulating film, and a line electrode. The metal film is formed on the source region and the drain region of the semiconductor layer, the area being at least a bottom of the contact hole. The thickness of the semiconductor layer in a region on which the metal film is not formed is smaller than the thickness of the semiconductor layer in a region on which the metal film is formed.
申请公布号 US2008191207(A1) 申请公布日期 2008.08.14
申请号 US20070965241 申请日期 2007.12.27
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 NISHIURA ATSUNORI
分类号 H01L29/04 主分类号 H01L29/04
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