发明名称 METHOD OF VERIFYING FIGURE DATA
摘要 PROBLEM TO BE SOLVED: To provide a verification method for highly accurately verifying a conversion error. SOLUTION: This method of verifying figure data is provided with: a step of inputting design data and depiction data; a step of dividing figures of the design data into an arbitrary angle figure and a non-arbitrary angle figure; a step of dividing figures of the depiction data into figures corresponding to the arbitrary angle figure and figures corresponding to the non-arbitrary angle figure; a step of executing exclusive OR operation using the arbitrary angle figure data and the corresponding figure data; a step of executing exclusive OR operation using the non-arbitrary figure data and the corresponding figure data; a step of removing a figure smaller than the first permissible error value from a figure generated as a result of operation of the arbitrary angle figure; a step of removing a figure smaller than the second permissible error value from a figure generated as a result of operation of the non-arbitrary figure; and a step of outputting a result after removing. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008177224(A) 申请公布日期 2008.07.31
申请号 JP20070007082 申请日期 2007.01.16
申请人 NUFLARE TECHNOLOGY INC 发明人 KASAHARA ATSUSHI;HARA SHIGEHIRO;SAKAMOTO SHINJI
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址