| 发明名称 |
APPARATUS FOR EJECTING FLUID ONTO A SUBSTRATE AND SYSTEM AND METHOD INCORPORATING THE SAME |
| 摘要 |
A fluid dispenser for use in the processing of substrates. The dispenser has a dome shaped body with a convex upper surface and has a number of conduits designed to supply fluid to the surface of a substrate at predetermined points.
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| 申请公布号 |
US2008178911(A1) |
申请公布日期 |
2008.07.31 |
| 申请号 |
US20070781835 |
申请日期 |
2007.07.23 |
| 申请人 |
HAHN CHRISTOPHER |
发明人 |
HAHN CHRISTOPHER |
| 分类号 |
B08B3/00;B08B3/02;B08B3/04;B08B3/12;B08B7/04 |
主分类号 |
B08B3/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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