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发明名称
VERFAHREN ZUR HERSTELLUNG VERSPANNTER SILIZIUM-AUF-ISOLATOR-STRUKTUREN UND DADURCH GEBILDETE VERSPANNTE SILIZIUM-AUF-ISOLATOR-STRUKTUREN
摘要
申请公布号
DE602005007592(D1)
申请公布日期
2008.07.31
申请号
DE200560007592T
申请日期
2005.03.22
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
FURUKAWA, TOSHIHARU;KOBURGER, III CHARLES;SLINKMAN, JAMES ALBERT
分类号
H01L21/84;H01L21/336;H01L21/762;H01L27/12;H01L29/786
主分类号
H01L21/84
代理机构
代理人
主权项
地址
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