| 摘要 |
A substrate processing apparatus for reliably reporting the variation state of a recipe. The substrate processing apparatus (100) comprises a main control unit (312) for transmitting a control command to process a substrate and a sub-control unit (314) for controlling the apparatus according to the control command from the main control unit (312). The main control unit (312) has a storage section (317) for storing recipes, a display control section (336) for receiving an implementation command to implement a given recipe out of the recipes, and a display section (334) for displaying the given recipe specified by the display control section (336) on an operation screen (308). When an implementation command to implement another recipe stored in the recipe storage means is received during the implementation of the given recipe, the factor causing the implementation command to implement the another recipe, the given recipe, and the another recipe are displayed on the operation screen (308).
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